ORION SERIES SPECIFICATIONS
Flexible Thin-film Production Systems

Deposition Zones: Front and back side, up to 14 deposition positions

Differential Pumping: Fully isolated deposition modules

Deposition Sources: Planar/Rotatable Magnetrons, Evaporation, PECVD and CVD

Power Supplies: AC / DC, Pulsed DC, RF or HIPIMS disciplines

Material Handling: Fully reversible, deposition in both directions
•Interleaf protection, before and after deposition
•Tracking systems, laser scribing, barcode scanning

Characterization: In-situ measurement options

Quality Control & Production Management: Data collection, networking and remote process monitoring

Maintenance: Optimized design provides Low cost of ownership user friendly interface and maintenance

Pumping Options: Turbomolecular, cryopump or hybrid combinations

Base Pressure: <5 x 10-7 Torr

Maximum Working Temperature: 500°C (932°F)

Material Capacity: 150- 1500 mm wide. Other sizes are available upon request

Line Speed: .1 to 10 meters per min.

Maximum Material Weight: 3500 lbs. dependent roll mechanism configuration

Power Requirements: 480V/3P/60Hz @ 800 amps (Final Requirements based on options selected)

Water & Air:
400 GPM (1500 l/m @ 15-26°C), 80 psi (5.5 bar) (Final Requirements based on options selected)

Applications:
• Solar cells
• Performance thin films
• Flexible circuit boards/conductors
• Blind process
• Enhanced reflectors/concentrators
• Flat Panel / Window Displays
  
  

Experience the Mustang Advantage.

Contact us today: +1 941-377-1440